sputter coating

A Design of Electric Power Supply for Magnetic Control Sputter Coating

一种磁控溅射镀膜电源的设计方法

Technological Parameters of TiN& Ion Sputter Coating Using Reaction Magnetron

反应磁控溅射离子镀TiN膜的工艺参数

The Ohmic contact and photoresponse of a ZnO single crystal film produced by MOCVD are investigated. The electrical and photoresponsive changes in the ZnO film due to the RF sputter deposition of SiO_2 ( antireflective coating) are also discussed.

对采用MOCVD方法沉积的ZnO单晶薄膜的欧姆接触特性、光电特性进行了研究，并对比研究了射频溅射沉积SiO2抗反射膜对ZnO薄膜I-V、光电特性的影响。

Update the processing methods to make SOFC from solid electrolytical film are by chemical vapour deposition, electrophoretic deposition, flow stretching, sputtering, plasma sputter coating, etc.

目前，SOFC用固体电解质薄膜制备方法有电化学气相沉积法、化学气相沉积法、电泳沉积法、溅射法、等离子喷涂法等。

Design of autocontrol coating process for ion beam sputter system

自动控制离子束溅射沉积光学薄膜系统设计